Laser-induced breakdown spectroscopy (LIBS) has been increasingly used in recent years to rapidly detect the elemental compositions of various materials in different media (i.e., solids, liquids, and gases). In this study, an aerosol-LIBS system was developed for the real-time monitoring of process-induced particles generated during the semiconductor manufacturing process. The aerosol-LIBS system developed for the purpose of this study consists primarily of a laser, a spectrometer, optics, and an aerosol chamber. A new aerosol chamber was constructed for application of the aerosol-LIBS to various semiconductor manufacturing processes, comprising exhaust tubes and low pressure and high temperature chambers. The aerosol-LIBS system was evaluated using laboratory-generated aerosols for the detection of various elements. The result was that P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is ongoing.