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Electron Beam Assisted Gas Phase Synthesis of SiO2 Nanoparticles in an Ambient Condition

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Volume: 12 | Issue: 6 | Pages: 1467-1471
DOI: 10.4209/aaqr.2012.05.0133
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Jin Hyoung Kim1, Youngku Sohn2, Insoo Kim3, Bumsoo Han3, Weon Gyu Shin 1

  • 1 Department of Mechanical Engineering, Chungnam National University, Daejeon 305-764, Korea
  • 2 Department of Chemistry, Yeungnam University, Gyeongsan, Gyeongbuk 712-749, Korea
  • 3 EB Tech Co., Ltd., Daejeon 305-500, Korea


This study presents a novel use of an electron beam irradiation system for the gas phase synthesis of nanoparticles, and demonstrates that SiO2 nanoparticles can be synthesized in ambient conditions. The formation of SiO2 nanoparticles is confirmed by the vibrational modes shown in FT-IR spectra, and the binding energy of Si 2p in the X-ray photoelectron spectrum. In this work, nanoparticles with average diameters of 210 nm and 73 nm were produced. The average particle size was controlled by adjusting the residence time of the precursor vapor.


SiO2 nanoparticle Electron beam irradiation Gas phase synthesis

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