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Acid Gas, Acid Aerosol and Chlorine Emissions from Trichlorosilane Burning Processes

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Volume: 11 | Issue: 3 | Pages: 323-330
DOI: 10.4209/aaqr.2011.03.0025
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Jhy-Charm Soo1, Siou-Rong Li1, Jenq-Renn Chen2, Cheng-Ping Chang3, Yu-Fang Ho3, Trong-Neng Wu 4, Perng-Jy Tsai 1,4

  • 1 Department of Environmental and Occupational Health, Medical College, National Cheng Kung University, 138, Sheng-Li Road, Tainan 70428, Taiwan
  • 2 Department of Safety, Health and Environmental Engineering, National Kaohsiung First University of Science & Technology, University Road, Yenchau, Kaohsiung, 824, Taiwan
  • 3 Institute of Occupational Safety and Health, Council of Labor Affairs, 99, Lane 407, Hengke Road, Sijhih City, Taipei County 22143, Taiwan
  • 4 Department of Occupational Safety and Health, College of Public Health, China Medical University and Hospital, 91, Hsueh-Shih Road, Taichung 40402, Taiwan


This study was set out to investigate the emission characteristics of HCl (in both particle (HClp) and gaseous (HClg) forms), and Cl2 during the trichlorosilane (TCS) burning process under various relative humidity conditions (RH; range = 55%–90%) which might exist at its storage area. All experiments were conducted in a test chamber. We found that HClp was consistently as the most dominant contaminant (= 1.30 × 105–1.46 × 105 mg/m3), followed by the HClg (= 9.03 × 103–11.4 × 103 mg/m3) and Cl2 (= 1.91 × 103–2.18 × 103), emitted from the TCS burning process for the all selected RH conditions. The particle sizes of HClp fell to the range of the accumulation mode (MMADs = 0.808–1.04 μm; GSDs = 2.13–3.50). Fractions of emitted HClp reaching to the alveolar region (= 85.8–88.8%) were much higher than that of the tracheobronchial region (= 6.53–8.80%) and head region (= 4.67–5.40%). It is concluded that more ill-health effects on the deep lung region can be expected than other regions as workers exposed to the contaminants emitted from TCS burning processes.


Trichlorosilane Burning process Acid gas, Acid aerosol Chlorine

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